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New Product Magnetron Sputtering Deposition Competitive Price High Capacity PVD Sputtering

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$700,000-1,400,000
Minimum order quantity: 1 set

model number

EL420

Key attributes

voltage

380V AC 3 PHASE+GND

machine type

SPRINGON EL420

coating

Vacuum Coating

warranty

1 Year

type

Coating Production Line

brand name

MEGAENERGY

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4 interest-free payments with

Key attributes

voltage
380V AC 3 PHASE+GND
machine type
SPRINGON EL420
coating
Vacuum Coating
warranty
1 Year
type
Coating Production Line
power(w)
120KW
place of origin
TAIWAN
weight (kg)
7800
brand name
MEGAENERGY
dimension(l*w*h)
5m x 3.5m x 1.4m
substrate Size
660*600mm
Process chamber
3
Sputtering Power
20kW
Uniformity(%)
+-5%~15%(depend on substrate size)
Sputtering rate(Y2O3)
Max 12.5nm/s
Ultimate vacuum
<8e-6mbar
Target utilization/lifetime
>30%/1000 cycles

Packaging and delivery

Selling Units
Single item
Single volume
0 cm³
Single gross weight
0.0 kg

Lead time

Product descriptions from the supplier