
Attributes
GasMedium
High Grade Metal Seal Mass Flow Controllertype
Japanplace of origin
Metalmaterial
-size
P32-04model number
brand name:KOFLOC
MODEL:5100 SERIES
Applicable gas:N2,Air,H2,He,Ar,O2,CO2 etc.
Control of minute flows:Available from F.S.1SCCM by N2 conversion
Diaphragm seat valve:Reduced dead volume









